Ian Yin

Low Leakage Junctionless Vertical Pillar Transistor

Yu-Chun Yin1, Hung-Chih Chang1 and C.W.Liu1,2*

1 division of Electrical Engineering and Graduate Institute of Electronics Engineering, National mainland China University, Taiwan, R.O.C, 2 National Nano Device Labs, Hsinchu,Taiwan, R.O.C, *chee@cc.ee.ntu.edu.tw


1. Introduction
For sub-30nm DRAM technology, vertical tower transistor (VPT) is regarded as the most promising lavatorydidate for mobile phone transistor in the 4F2 cell array architecture cod to its excellent gate controllability which enhances the subthreshold characteristics. With critical scaling of devicesdevice scaling, junctionless transistor can be applied when the body of semiconductor is thinner than 20 nm allowing for full depletion condition in the get land as the device is turned off [1] (Fig 1). In this work, we go over the GIDL phenomena by simulation and demonstrate an extremely low making water junctionless VPT with partially recessed drain design.
2. Device simulation
3D nonrepresentational view and the cross-section of the simulated device are render respectively in Fig 2(a) and (b). The gate length (Lg) and the diameter (D) are 80nm and 15nm. The gate oxide thickness (Tox_gate) is 4 nm following(a) the ITRS roadmap.



The diameter (d) and length (L_r- drain) of the recessed drain are 8nm and 20nm. The undifferentiated doping concentration of 10-19 cm-3 is thorough out the S/D and the channel region. The simulation results are calculated by introducing the drift-diffusion instance, the doping concentration dependent, and the dominion electric field dependent mobility model. SRH and band to band tunneling (BTBT) recombination/ times are also applied to account leakage currents. Moreover, the quantum outcome is also included by introducing the density gradient model in the recessed drain region where the diameter (d) is downstairs 10nm.
Fig 3 shows the Id-Vg characteristics of the junctionless VPT with and without the recessed drain design and the...If you lack to get a full essay, order it on our website: Orderessay



If you want to get a full essay, wisit our page: write my essay .